Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11090893 | Method of reclaiming a seal | Shagun P. Maheshwari, Yao-Hung YANG, Tom K. Cho, Yu-Chi Yeh, Andrew Yu +1 more | 2021-08-17 |
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Yixing Lin, Tasnuva Tabassum, Yikai Chen, Kevin A. PAPKE | 2021-06-29 |