Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Tasnuva Tabassum, Siamak Salimian, Yikai Chen, Kevin A. PAPKE | 2021-06-29 | $47,858,000 |