Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11118263 | Method for forming a protective coating film for halide plasma resistance | Yogita Pareek, Kevin A. PAPKE, Mahmut Sami Kavrik, Andrew C. Kummel | 2021-09-14 | $84,054,000 |