Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170990 | Polysilicon liners | Krishna Nittala, Rui Cheng, Praket P. Jha, Jinrui GUO, Jingmei Liang | 2021-11-09 |
| 11017986 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Truong Van Nguyen, Nattaworn Boss Nunta, Joseph AuBuchon +1 more | 2021-05-25 |