Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane +2 more | 2021-06-22 |
| 11043387 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Kenneth S. Collins, Steven Lane, Yue Guo | 2021-06-22 |