Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998185 | Substrate cleaning method, substrate cleaning apparatus, and method for fabricating a semiconductor device using the apparatus | Minhyoung KIM, Wonhyuk Jang, Hoseop Choi, Jeongmin Bang, Kyuhee Han | 2021-05-04 |
| 10950414 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Sang Ki Nam, Akira Koshiishi, Kwangyoub Heo, Sunggil Kang, Sungyong Lim +1 more | 2021-03-16 |