Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Neema Rastgar | 2021-07-06 |
| 11011351 | Monoenergetic ion generation for controlled etch | Juline Shoeb, Ying Wu | 2021-05-18 |
| 10957521 | Image based plasma sheath profile detection on plasma processing tools | Yuhou Wang, Michael J. Martin, Jon McChesney | 2021-03-23 |