Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Neema Rastgar, Alexander Paterson | 2021-07-06 | $186,056,000 |