Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2021-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056321 | Metal contamination reduction in substrate processing systems with transformer coupled plasma | Maolin Long, Alexander Paterson | 2021-07-06 |