Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054735 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo, Hiroaki Shishido | 2021-07-06 |
| 11016382 | Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Atsushi Kominato | 2021-05-25 |
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Kazuya Sakai | 2021-03-09 |
| 10942441 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Hiroaki Shishido | 2021-03-09 |
| 10942440 | Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device | Hiroyuki Iwashita, Atsushi Matsumoto | 2021-03-09 |
| 10935881 | Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method | Takenori Kajiwara, Hiroaki Shishido | 2021-03-02 |
| 10915016 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido | 2021-02-09 |