Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2021-03-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2021-03-09 |