Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119400 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Takashi Uchida | 2021-09-14 |
| 11119399 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Atsushi Matsumoto, Takashi Uchida | 2021-09-14 |
| 11112690 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2021-09-07 |
| 11054735 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo, Osamu Nozawa | 2021-07-06 |
| 11048160 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Masahiro Hashimoto | 2021-06-29 |
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Kazuya Sakai | 2021-03-09 |
| 10942441 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2021-03-09 |
| 10935881 | Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method | Takenori Kajiwara, Osamu Nozawa | 2021-03-02 |
| 10915016 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2021-02-09 |