Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054735 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido, Osamu Nozawa | 2021-07-06 |
| 10942441 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2021-03-09 |
| 10935881 | Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method | Hiroaki Shishido, Osamu Nozawa | 2021-03-02 |