Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199040 | Rotation transmission mechanism and damper device | Takehiko Yazawa, Satoru Yokoe | 2021-12-14 |
| 11158492 | Film forming apparatus and film forming method | Hiroyuki Toshima, Tatsuo Hirasawa | 2021-10-26 |
| 10942440 | Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device | Atsushi Matsumoto, Osamu Nozawa | 2021-03-09 |