HT

Hiroyuki Toshima

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #432,164 of 548,734Top 80%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11158492 Film forming apparatus and film forming method Hiroyuki Iwashita, Tatsuo Hirasawa 2021-10-26