Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016382 | Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2021-05-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016382 | Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2021-05-25 |