Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143598 | Defect inspection apparatus and defect inspection method | Toshifumi Honda, Shunichi Matsumoto, Masami Makuuchi, Keiko Oka | 2021-10-12 |
| 10955361 | Defect inspection apparatus and pattern chip | Toshifumi Honda, Akio Yazaki, Yukihiro Shibata, Hideki Fukushima, Yasuhiro Yoshitake | 2021-03-23 |
| 10948424 | Defect inspection device, pattern chip, and defect inspection method | Yukihiro Shibata, Toshifumi Honda, Yasuhiro Yoshitake, Hideki Fukushima | 2021-03-16 |