Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955361 | Defect inspection apparatus and pattern chip | Yuta Urano, Toshifumi Honda, Yukihiro Shibata, Hideki Fukushima, Yasuhiro Yoshitake | 2021-03-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955361 | Defect inspection apparatus and pattern chip | Yuta Urano, Toshifumi Honda, Yukihiro Shibata, Hideki Fukushima, Yasuhiro Yoshitake | 2021-03-23 |