Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143598 | Defect inspection apparatus and defect inspection method | Shunichi Matsumoto, Masami Makuuchi, Yuta Urano, Keiko Oka | 2021-10-12 |
| 11143600 | Defect inspection device | Masami Makuuchi, Shunichi Matsumoto, Akira Hamamatsu, Nobuhiro Obara | 2021-10-12 |
| 11041815 | Inspection information generation device, inspection information generation method, and defect inspection device | Takahiro Urano, Takashi Hiroi, Nobuaki Hirose | 2021-06-22 |
| 10955361 | Defect inspection apparatus and pattern chip | Yuta Urano, Akio Yazaki, Yukihiro Shibata, Hideki Fukushima, Yasuhiro Yoshitake | 2021-03-23 |
| 10948424 | Defect inspection device, pattern chip, and defect inspection method | Yuta Urano, Yukihiro Shibata, Yasuhiro Yoshitake, Hideki Fukushima | 2021-03-16 |