Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955361 | Defect inspection apparatus and pattern chip | Yuta Urano, Toshifumi Honda, Akio Yazaki, Yukihiro Shibata, Yasuhiro Yoshitake | 2021-03-23 |
| 10948424 | Defect inspection device, pattern chip, and defect inspection method | Yuta Urano, Yukihiro Shibata, Toshifumi Honda, Yasuhiro Yoshitake | 2021-03-16 |