Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047503 | Actuator, valve device, and fluid supply system | Takeru Miura, Tsutomu Shinohara, Tomohiro Nakata, Toshiyuki Inada, Kazunari Watanabe +2 more | 2021-06-29 |
| 11022224 | Valve device, flow control method using the same, and semiconductor manufacturing method | Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi +1 more | 2021-06-01 |