Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164738 | Compositions and methods for removing ceria particles from a surface | Daniela White, Thomas Parson, Michael White, Atanu K. Das | 2021-11-02 |
| 11053440 | Silicon nitride etching composition and method | Steven M. Bilodeau, SeongJin Hong, Hsing-Chen Wu, Min-Chieh Yang | 2021-07-06 |
| 10991809 | Composition and process for selectively etching p-doped polysilicon relative to silicon nitride | Steven M. Bilodeau | 2021-04-27 |
| 10957547 | Formulations to selectively etch silicon germanium relative to germanium | Steven M. Bilodeau | 2021-03-23 |
| 10920141 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Steven Lippy, Lingyan Song | 2021-02-16 |