Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152219 | Selectively etching materials | Chieh-Ju Wang, Chia-Jung Hsu | 2021-10-19 |
| 11053440 | Silicon nitride etching composition and method | Steven M. Bilodeau, SeongJin Hong, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |