Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053440 | Silicon nitride etching composition and method | Steven M. Bilodeau, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053440 | Silicon nitride etching composition and method | Steven M. Bilodeau, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |