Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053440 | Silicon nitride etching composition and method | SeongJin Hong, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper | 2021-07-06 |
| 10991809 | Composition and process for selectively etching p-doped polysilicon relative to silicon nitride | Emanuel I. Cooper | 2021-04-27 |
| 10957547 | Formulations to selectively etch silicon germanium relative to germanium | Emanuel I. Cooper | 2021-03-23 |