Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11169445 | Pupil facet mirror, optical system and illumination optics for a projection lithography system | Martin Endres, Thomas Fischer | 2021-11-09 |
| 11003086 | Illumination optical device for projection lithography | Markus Deguenther | 2021-05-11 |
| 10948828 | Illumination optical element for projection lithography | Markus Deguenther | 2021-03-16 |