Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11061334 | Pupil facet mirror, illumination optics and optical system for a projection lithography system | — | 2021-07-13 |
| 11003086 | Illumination optical device for projection lithography | Stig Bieling | 2021-05-11 |
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Enrico Geissler, Dirk Doering, Lakshmanan Senthil Kumar, Guenter Rudolph +1 more | 2021-05-11 |
| 10948828 | Illumination optical element for projection lithography | Stig Bieling | 2021-03-16 |