Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137615 | Illumination device for a projector having a light modulator | Peter Klopfleisch, Bryce Anton Moffat, Alexander Gratzke | 2021-10-05 |
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Enrico Geissler, Lakshmanan Senthil Kumar, Guenter Rudolph, Martin Voelcker +1 more | 2021-05-11 |