Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Enrico Geissler, Dirk Doering, Lakshmanan Senthil Kumar, Guenter Rudolph +1 more | 2021-05-11 |