Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003090 | Lithography apparatus comprising a plurality of individually controllable write heads | Stefan Richter, Dirk Doering, Lakshmanan Senthil Kumar, Guenter Rudolph, Martin Voelcker +1 more | 2021-05-11 |
| 10942122 | Microscopy method | Christoph Nieten, Marco Wilzbach, Susanne Kohlhammer | 2021-03-09 |