Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164738 | Compositions and methods for removing ceria particles from a surface | Daniela White, Thomas Parson, Emanuel I. Cooper, Atanu K. Das | 2021-11-02 |
| 11149235 | Cleaning composition with corrosion inhibitor | Daniela White, Elizabeth THOMAS, Jun Liu, Chao-Yu Wang, Donald Frye | 2021-10-19 |
| 11124746 | Post CMP cleaning composition | Daniela White, Jun Liu, Elizabeth THOMAS | 2021-09-21 |
| 11124741 | Ceria removal compositions | Atanu K. Das, Daniela White | 2021-09-21 |
| 11124740 | Post chemical mechanical polishing cleaning compositions | Atanu K. Das, Daniela White | 2021-09-21 |
| 11085011 | Post CMP cleaning compositions for ceria particles | Elizabeth THOMAS, Daniela White, Atanu K. Das | 2021-08-10 |
| 10988718 | Tungsten post-CMP cleaning composition | Thomas Parson, Shrane-Ning Jenq, Steven Medd, Daniela White, Donald Frye | 2021-04-27 |