Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920141 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Emanuel I. Cooper, Lingyan Song | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10920141 | Compositions and methods for selectively etching titanium nitride | Li-Min Chen, Emanuel I. Cooper, Lingyan Song | 2021-02-16 |