Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more | 2021-09-14 |
| 10976413 | LIDAR system with synchronized MEMS mirrors | Yang Han | 2021-04-13 |
| 10928488 | LIDAR 3D design using a polygon mirror | Tianjia Sun, Xiangfei Zhou, Yang Han | 2021-02-23 |