Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126093 | Focus and overlay improvement by modifying a patterning device | Richard Johannes Franciscus Van Haren, Leon Paul VAN DIJK, Willem Seine Christian Roelofs, Wim Tjibbo Tel, Stefan Hunsche +1 more | 2021-09-21 |
| 10996176 | Methods and apparatus for measuring a property of a substrate | Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma +5 more | 2021-05-04 |
| 10990018 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Emil Peter Schmitt-Weaver, Yichen Zhang +4 more | 2021-04-27 |