Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126093 | Focus and overlay improvement by modifying a patterning device | Richard Johannes Franciscus Van Haren, Reiner Maria Jungblut, Willem Seine Christian Roelofs, Wim Tjibbo Tel, Stefan Hunsche +1 more | 2021-09-21 |