Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Norihiko Sasagawa, Masahito Hamada | 2020-08-25 |
| 10643872 | Liquid processing apparatus, liquid processing method, and storage medium | Masahiro Abe, Tohru Azuma, Tsunenaga Nakashima, Naofumi Kishita, Hideki Kajiwara | 2020-05-05 |