MH

Masahito Hamada

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #364,733 of 565,922Top 65%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10755952 Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium Norihiko Sasagawa, Hiroichi Inada 2020-08-25