Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Hiroichi Inada, Masahito Hamada | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755952 | Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium | Hiroichi Inada, Masahito Hamada | 2020-08-25 |