TA

Tohru Azuma

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #243,281 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10643872 Liquid processing apparatus, liquid processing method, and storage medium Masahiro Abe, Hiroichi Inada, Tsunenaga Nakashima, Naofumi Kishita, Hideki Kajiwara 2020-05-05