Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Katsunori Ichino, Hideo Funakoshi, Nobuaki Matsuoka, Masayuki Kajiwara | 2020-10-20 |
| 10643872 | Liquid processing apparatus, liquid processing method, and storage medium | Masahiro Abe, Hiroichi Inada, Tohru Azuma, Naofumi Kishita, Hideki Kajiwara | 2020-05-05 |