Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861678 | Plasma etching apparatus and method | Noriyuki Kobayashi, Shigeru Yoneda, Kenichi Hanawa, Shigeru Tahara, Masaru Sugimoto | 2020-12-08 |
| 10854431 | Plasma processing apparatus and method | Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +11 more | 2020-12-01 |
| 10720314 | Confinement ring for use in a plasma processing system | Rajinder Dhindsa, Alexei Marakhatanov | 2020-07-21 |
| 10546727 | Plasma processing apparatus and method | Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +10 more | 2020-01-07 |
| 10529596 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Chishio Koshimizu | 2020-01-07 |