Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861678 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Shigeru Tahara, Masaru Sugimoto | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861678 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Shigeru Tahara, Masaru Sugimoto | 2020-12-08 |