Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861678 | Plasma etching apparatus and method | Akira Koshiishi, Noriyuki Kobayashi, Shigeru Yoneda, Kenichi Hanawa, Masaru Sugimoto | 2020-12-08 |
| 10825688 | Method for etching copper layer | Daisuke Urayama, Kenji Matsumoto, Hidenori Miyoshi | 2020-11-03 |
| 10770308 | Etching method | Nobuaki Seki, Takahiko Kato | 2020-09-08 |
| 10626498 | Method of processing target object to be processed | Eiichi Nishimura | 2020-04-21 |