Issued Patents 2020
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2020-12-01 |
| 10847341 | Plasma processing apparatus | Naoki Matsumoto, Satoshi Tanaka, Toru Ito | 2020-11-24 |
| 10804072 | Plasma processing apparatus | Naoki Matsumoto, Satoshi Tanaka, Toru Ito | 2020-10-13 |
| 10804076 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2020-10-13 |
| 10777392 | Substrate processing apparatus | Jun Yamawaku | 2020-09-15 |
| 10685859 | Plasma processing apparatus | Tatsuo Matsudo | 2020-06-16 |
| 10672589 | Plasma processing apparatus and control method | Shin Hirotsu | 2020-06-02 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Ryuji Ohtani +10 more | 2020-01-07 |
| 10529596 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Akira Koshiishi | 2020-01-07 |