Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10746531 | Wear amount measuring apparatus and method, temperature measuring apparatus and method and substrate processing system | — | 2020-08-18 |
| 10734201 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Akitaka Shimizu | 2020-08-04 |
| 10685859 | Plasma processing apparatus | Chishio Koshimizu | 2020-06-16 |