Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734201 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Tatsuo Matsudo | 2020-08-04 |
| 10541145 | Substrate processing apparatus and substrate processing method | Hiroyuki Ogawa, Tomoya Okubo | 2020-01-21 |