TO

Tomoya Okubo

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
Overall (2020): #240,529 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10541145 Substrate processing apparatus and substrate processing method Hiroyuki Ogawa, Akitaka Shimizu 2020-01-21