Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804076 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Kazuki Denpoh, Masashi Saito | 2020-10-13 |
| 10777392 | Substrate processing apparatus | Chishio Koshimizu | 2020-09-15 |