Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870151 | Structure and method for sealing through-hole, and transfer substrate for sealing through-hole | Toshinori Ogashiwa, Masayuki Miyairi, Kenichi Inoue | 2020-12-22 |
| 10763147 | Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the same | Junnosuke TAGUCHI, Toshiya Chiba | 2020-09-01 |
| 10640409 | Method of manufacturing glass container | Kenjirou Arai | 2020-05-05 |
| 10615066 | Substrate warping monitoring device and substrate processing apparatus using the same, and substrate warping monitoring method | Toshiya Chiba, Junnosuke TAGUCHI | 2020-04-07 |
| 10549305 | Support structure for suspended injector and substrate processing apparatus using same | Kiichi Takahashi, Yasushi Takeuchi | 2020-02-04 |