Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763147 | Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the same | Yuya Sasaki, Toshiya Chiba | 2020-09-01 |
| 10615066 | Substrate warping monitoring device and substrate processing apparatus using the same, and substrate warping monitoring method | Toshiya Chiba, Yuya Sasaki | 2020-04-07 |